Development of Antireflective Interference Coatings in the Range of 3–5 µm for Optical Parametric Oscillators Based on ZnGeP

Abstract

The dispersions of the refractive index and absorption coefficient were determined for monolayers of titanium oxide and silicon oxide. The design of a multilayer antireflective optical coating for these materials in the spectral range of 0.4–8 μm has been developed. Modes for applying coating using ion-beam sp-uttering onto a semiconductor substrate have been selected. The optical characteristics of a four-layer interference coating with antireflection coating on a ZGP substrate were measured in the range of 2097 nm and 3.5–5 μm, with residual reflection R ≤ 0.2% and R ≤ 2.1%, respectively. Tests were carried out for adhesion and abrasion of the coating in accordance with GOST.

Comments (0)

No login
gif